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1No 1Yes

1atomic force microscopy 1biosensors 1displacement measurement 1electrostatics 1error analysis 1force measurement 1microcantilevers 1nanopositioning 1stiffness identification

1Moheimani, S. O. R. 1Moheimani, S. O. Reza 1Moore, Steven 1Moore, Steven Ian

Date

12014 12015

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1No 1Yes

1atomic force microscopy 1biosensors 1displacement measurement 1electrostatics 1error analysis 1force measurement 1microcantilevers 1nanopositioning 1stiffness identification

1Moheimani, S. O. R. 1Moheimani, S. O. Reza 1Moore, Steven 1Moore, Steven Ian

Date

12014 12015

1Adobe Acrobat PDF

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Date

Feedback-controlled MEMS force sensor for characterization of microcantilevers

- Moore, Steven Ian, Coskun, M. Bulut, Alan, Tuncay, Neild, Adrian, Moheimani, S. O. R.

Creator: Moore, Steven Ian , Coskun, M. Bulut , Alan, Tuncay , Neild, Adrian , Moheimani, S. O. R.
Resource Type: journal article
Date: 2015

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Zero displacement microelectromechanical force sensor using feedback control

- Coskun, M. Bulut, Moore, Steven, Moheimani, S. O. Reza, Neild, Adrian, Alan, Tuncay

Creator: Coskun, M. Bulut , Moore, Steven , Moheimani, S. O. Reza , Neild, Adrian , Alan, Tuncay
Resource Type: journal article
Date: 2014

Zero displacement microelectromechanical force sensor using feedback control

Creator: Coskun, M. Bulut , Moore, Steven , Moheimani, S. O. Reza , Neild, Adrian , Alan, Tuncay
Resource Type: journal article
Date: 2014

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