- Title
- Zero displacement microelectromechanical force sensor using feedback control
- Creator
- Coskun, M. Bulut; Moore, Steven; Moheimani, S. O. Reza; Neild, Adrian; Alan, Tuncay
- Relation
- Applied Physics Letters Vol. 104, Issue 15
- Publisher Link
- http://dx.doi.org/10.1063/1.4871380
- Publisher
- American Institute of Physics
- Resource Type
- journal article
- Date
- 2014
- Description
- Conventional microscale force sensors use moving parts to infer applied forces. Whenever physical deformations are involved, the sensor characteristics become a function of mechanical parameters, and there is an inevitable trade-off between the sensitivity and measurement range. We developed a microfabricated force sensor that uses feedback control to nullify any displacements within the device, directly transducing forces as high as 1.5 mN with a 7.8 nN resolution. The range and sensitivity of the device no longer depend on mechanical parameters, which allow the same device to be used to test samples with a wide range of stiffnesses without loss of accuracy.
- Subject
- microelectromechanical systems; biosensors; atomic force microscopy; electrostatics; error analysis
- Identifier
- http://hdl.handle.net/1959.13/1067073
- Identifier
- uon:18303
- Identifier
- ISSN:0003-6951
- Language
- eng
- Full Text
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