A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors
- Maroufi, Mohammad, Moheimani, S. O. Reza
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane
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