Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza
Design of an inertially counterbalanced z-nanopositioner for high-speed atomic force microscopy
- Yong, Y. K., Mohemani, S. O. R.
Design, modeling, and FPAA-based control of a high-speed atomic force microscope nanopositioner
- Yong, Yuen Kuan, Bhikkaji, Bharath, Moheimani, S. O. Reza
MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design
- Maroufi, Mohammad, Fowler, Anthony G., Reza Moheimani, S. O.
MEMS-based nanopositioning for on-chip high-speed scanning probe microscopy
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane
Sensor fusion for improved control of piezoelectric tube scanners
- Fleming, Andrew J., Wills, Adrian G., Moheimani, S. O. Reza
Sensorless damping control of a high speed flexure guided nanopositioner
- Fairbairn, Matthew W., Wadikhaye, Sachin P., Moheimani, S. O. Reza
Tracking control of a monolithic piezoelectric nanopositioning stage using an integrated sensor
- Omidbeike, Meysam, Teo, Yik R., Yong, Yuen K., Fleming, Andrew J.
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