A low-flicker-noise MEMS electrothermal displacement sensing technique

- Mohammadi, A., Yuce, M. R., Moheimani, S. O. R.

A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor

- Ji, Lujun, Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

Cross coupling in parallel kinematic MEMS nanopositioners

- Maroufi, Mohammad, Moheimani, S. O. Reza

Design and analysis of novel microelectromechanical systems for energy harvesting and nanopositioning applications

- Fowler, Anthony

Displacement measurement with a self-sensing MEMS electrostatic drive

- Moore, Steven I., Moheimani, S. O. Reza

Feedback-controlled MEMS force sensor for characterization of microcantilevers

- Moore, Steven Ian, Coskun, M. Bulut, Alan, Tuncay, Neild, Adrian, Moheimani, S. O. R.

Frequency modulation technique for MEMS resistive sensing

- Mohammadi, Ali, Yuce, Mehmet Rasit, Moheimani, S. O. Reza

MEMS nanopositioner for Lissajous-scan atomic force microscopy

- Fowler, Anthony G., Maroufi, Mohammad, Bazaei, Ali, Moheimani, S. O. Reza

Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy

- Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza

Parallel averaging for thermal noise mitigation in MEMS electrothermal displacement sensors

- Mohammadi, Ali, Moheimani, S. O. R., Yuce, Mehmet Rasit

Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner

- Bazaei, Ali, Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza

Vibration control with MEMS electrostatic drives: a self-sensing approach

- Moore, Steven Ian, Moheimani, S. O. Reza

Zero displacement microelectromechanical force sensor using feedback control

- Coskun, M. Bulut, Moore, Steven, Moheimani, S. O. Reza, Neild, Adrian, Alan, Tuncay