Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing
- Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. Reza
Displacement sensing with silicon flexures in MEMS nanopositioners
- Bazaei, Ali, Maroufi, Mohammad, Mohammadi, Ali, Moheimani, S. O. R.
High precision MEMS displacement sensors: device techniques and readout circuits
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane
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