Displacement amplification and differential actuation in piezo driven nanopositioners
- Bazaei, Ali, Ettefagh, Massoud Hemmasian, Chen, Zhiyong
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane
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