A hybrid control strategy for vibration damping and precise tip-positioning of a single-link flexible manipulator
A new method for robust damping and tracking control of scanning probe microscope positioning stages
Achieving high-bandwidth nanopositioning in presence of plant uncertainties
Design, analysis and control of a fast nanopositioning stage
Design, identification, and control of a flexure-based XY stage for sast nanoscale positioning
Loop-shaping H ∞-control of a 2-DOF piezoelectric-stack actuated platform for nanoscale positioning
Minimizing scanning errors in piezoelectric stack-actuated nanopositioning platforms
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