A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
- Creator: Fowler, A. G. , Laskovski, A. N. , Hammond, A. C. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
A closed-loop phase-locked interferometer for wide bandwidth position sensing
- Creator: Fleming, Andrew J. , Routley, Ben , Holdsworth, John L.
- Resource Type: conference paper
- Date: 2015
A comparison of two excitation modes for MEMS electrothermal displacement sensors
- Creator: Mohammadi, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2014
A feedback controlled MEMS nanopositioner for on-chip high-speed AFM
- Creator: Mohammadi, Ali , Fowler, Anthony G. , Yong, Yuen K. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
A five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet
- Creator: Omidbeike, Meysam , Yong, Yuen K. , Moore, Steven I. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2019
A low-flicker-noise MEMS electrothermal displacement sensing technique
- Creator: Mohammadi, A. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
A micromachined nanopositioner with on-chip electrothermal actuation and sensing
- Creator: Zhu, Y. , Bazaei, A. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010
A monolithic serial-kinematic nanopositioner with integrated sensors and actuators
- Creator: Moore, Steven Ian , Omidbeike, Meysam , Fleming, Andrew , Yong, Yuen Kuan
- Resource Type: conference paper
- Date: 2018
A new preload mechanism for a high-speed piezoelectric stack nanopositioner
- Creator: Yong, Yuen Kuan
- Resource Type: journal article
- Date: 2016
A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner
- Creator: Yong, Yuen Kuan , Fleming, Andrew J. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2013
A novel state transformation approach to tracking of piecewise linear trajectories
- Creator: Bazaei, Ali , Chen, Zhiyong , Yong, Yuen Kuan , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2018
A review of nanometer resolution position sensors: operation and performance
- Creator: Fleming, Andrew J.
- Resource Type: journal article
- Date: 2013
A robust loop-shaping approach to fast and accurate nanopositioning
- Creator: Aphale, Sumeet S. , Ferreira, Antoine , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2013
Achieving high-bandwidth nanopositioning in presence of plant uncertainties
- Creator: Aphale, Sumeet S. , Devasia, Santosh , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2008
Achieving subnanometer precision in a MEMS-based storage device during self-servo write process
- Creator: Sebastian, Abu , Pantazi, Angeliki , Moheimani, S. O. Reza , Pozidis, Haris , Eleftheriou, Evangelos
- Resource Type: journal article
- Date: 2008
An analytical approach to integral resonant control of second-order systems
- Creator: Namavar, Mohammad , Fleming, Andrew J. , Aleyaasin, Majid , Nakkeeran, K. , Aphale, Sumeet S.
- Resource Type: journal article
- Date: 2014
An experimental comparison of PI, inversion, and damping control for high performance nanopositioning
- Creator: Fleming, Andrew J. , Leang, Kam K.
- Resource Type: conference paper
- Date: 2013
An ultrathin monolithic XY nanopositioning stage constructed from a single sheet of piezoelectric material
- Creator: Fleming, Andrew J. , Yong, Yuen Kuan
- Resource Type: journal article
- Date: 2017
Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner
- Creator: Wadikhaye, Sachin P. , Bhikkaji, Bharath , Moheimani, S. O. Reza , Yong, Yuen Kuan
- Resource Type: conference paper
- Date: 2012
Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning
- Creator: Moore, Steven I. , Fleming, Andrew J. , Yong, Yuen Kuan
- Resource Type: journal article
- Date: 2019