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A compact XYZ scanner for fast atomic force microscopy in constant force contact mode

A monolithic serial-kinematic nanopositioner with integrated sensors and actuators

A new preload mechanism for a high-speed piezoelectric stack nanopositioner

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

A novel state transformation approach to tracking of piecewise linear trajectories

A serial-kinematic nanopositioner for high-speed atomic force microscopy

A Z-scanner design for high-speed scanning probe microscopy

Adaptive scan for atomic force microscopy based on online optimization: theory and experiment

AFM cantilever design for multimode Q control: arbitrary placement of higher order modes

An optimization framework for the design of piezoelectric AFM cantilevers

An ultrathin monolithic XY nanopositioning stage constructed from a single sheet of piezoelectric material

Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner

Arbitrary placement of AFM cantilever higher eigenmodes using structural optimization

Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning

Collocated Z-axis control of a high-speed nanopositioner for video-rate atomic force microscopy

Combining spiral scanning and internal model control for sequential AFM imaging at video rate

Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations

Control of a high-speed nanopositioner for lissajous-scan video-rate AFM

Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner

Design and analysis of piezoelectric cantilevers with enhanced higher eigenmodes for atomic force microscopy

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