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A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors

A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control

Cross coupling in parallel kinematic MEMS nanopositioners

Design and control of a MEMS nanopositioner with bulk piezoresistive sensors

Design and control of a single-chip SOI-MEMS atomic force microscope

Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Displacement sensing with silicon flexures in MEMS nanopositioners

High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy

Internal model control for spiral trajectory tracking with MEMS AFM scanners

Kalman filter enabled high-speed control of a MEMS nanopositioner

MEMS nanopositioner for Lissajous-scan atomic force microscopy

MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design

MEMS-based nanopositioning for on-chip high-speed scanning probe microscopy

Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift

Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy

On the modeling of tilted fixed-guided flexible beams under tension

On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach

Tilted beam piezoresistive displacement sensor: design, modeling, and characterization

Tracking control of constant-linear-velocity spiral reference by LQG method

Tracking of constant-linear-velocity spiral trajectories by approximate internal model control

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