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A comprehensive analysis of MEMS electrothermal displacement sensors

A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control

A Micro-Robotic Approach for The Correction of Angular Deviations in AFM Samples From Generic Topographic Data

A novel state transformation approach to tracking of piecewise linear trajectories

An analysis of signal transformation approach to triangular waveform tracking

Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor

Combining spiral scanning and internal model control for sequential AFM imaging at video rate

Control of a high-speed nanopositioner for lissajous-scan video-rate AFM

Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing

Design and control of a MEMS micro-gripper with integrated electro-thermal force sensor

Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Displacement amplification and differential actuation in piezo driven nanopositioners

Displacement sensing by piezoelectric transducers in high-speed lateral nanopositioning

Displacement sensing with silicon flexures in MEMS nanopositioners

Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors

High-speed, ultra-high precision nanopositioning: a signal transformation approach

High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy

Hysteresis in nanopositioning systems driven by dual-stack differential driving piezoelectric actuators

Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters

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