A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM

- Fowler, A. G., Laskovski, A. N., Hammond, A. C., Moheimani, S. O. R.

A closed-loop phase-locked interferometer for wide bandwidth position sensing

- Fleming, Andrew J., Routley, Ben, Holdsworth, John L.

A comparison of two excitation modes for MEMS electrothermal displacement sensors

- Mohammadi, Ali, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM

- Mohammadi, Ali, Fowler, Anthony G., Yong, Yuen K., Moheimani, S. O. Reza

A five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet

- Omidbeike, Meysam, Yong, Yuen K., Moore, Steven I., Fleming, Andrew J.

A low-flicker-noise MEMS electrothermal displacement sensing technique

- Mohammadi, A., Yuce, M. R., Moheimani, S. O. R.

A micromachined nanopositioner with on-chip electrothermal actuation and sensing

- Zhu, Y., Bazaei, A., Moheimani, S. O. R., Yuce, M. R.

A monolithic serial-kinematic nanopositioner with integrated sensors and actuators

- Moore, Steven Ian, Omidbeike, Meysam, Fleming, Andrew, Yong, Yuen Kuan

A new preload mechanism for a high-speed piezoelectric stack nanopositioner

- Yong, Yuen Kuan

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

- Yong, Yuen Kuan, Fleming, Andrew J., Moheimani, S. O. Reza

A novel state transformation approach to tracking of piecewise linear trajectories

- Bazaei, Ali, Chen, Zhiyong, Yong, Yuen Kuan, Moheimani, S. O. Reza

A review of nanometer resolution position sensors: operation and performance

- Fleming, Andrew J.

A robust loop-shaping approach to fast and accurate nanopositioning

- Aphale, Sumeet S., Ferreira, Antoine, Moheimani, S. O. Reza

Achieving high-bandwidth nanopositioning in presence of plant uncertainties

- Aphale, Sumeet S., Devasia, Santosh, Moheimani, S. O. Reza

Achieving subnanometer precision in a MEMS-based storage device during self-servo write process

- Sebastian, Abu, Pantazi, Angeliki, Moheimani, S. O. Reza, Pozidis, Haris, Eleftheriou, Evangelos

An analytical approach to integral resonant control of second-order systems

- Namavar, Mohammad, Fleming, Andrew J., Aleyaasin, Majid, Nakkeeran, K., Aphale, Sumeet S.

An experimental comparison of PI, inversion, and damping control for high performance nanopositioning

- Fleming, Andrew J., Leang, Kam K.

An ultrathin monolithic XY nanopositioning stage constructed from a single sheet of piezoelectric material

- Fleming, Andrew J., Yong, Yuen Kuan

Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner

- Wadikhaye, Sachin P., Bhikkaji, Bharath, Moheimani, S. O. Reza, Yong, Yuen Kuan

Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning

- Moore, Steven I., Fleming, Andrew J., Yong, Yuen Kuan