A compact XYZ scanner for fast atomic force microscopy in constant force contact mode
A grounded-load charge amplifier for reducing hysteresis in piezoelectric tube scanners
A hybrid control strategy for vibration damping and precise tip-positioning of a single-link flexible manipulator
A Kalman filter for amplitude estimation in high-speed dynamic mode atomic force microscopy
A MEMS nanopositioner with thermal actuator and on-chip thermal sensor
A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
A new method for robust damping and tracking control of scanning probe microscope positioning stages
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