Temperature control for nano-scale films by spatially-separated atomic layer deposition based on generalized predictive control
He, Wen-Jie, Zhang, Hai-Tao, Chen, Zhiyong, Lin, Ji-Long, Tian, Kan, Shan, Bin, Chen, Rong
Generalized predictive control of temperature on an atomic layer deposition reactor
He, Wen-Jie, Zhang, Hai-Tao, Chen, Zhiyong, Chu, Bo, Cao, Kun, Shan, Bin, Chen, Rong
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