Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2021
A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors
- Creator: Maroufi, Mohammad , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2016