SNR improvement in MEMS electrothermal displacement sensors
- Creator: Mohammadi, A. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: conference paper
- Date: 2014
Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
- Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2012
A MEMS nanopositioner with thermal actuator and on-chip thermal sensor
- Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010