Iterative Deconvolution for Exposure Planning in Scanning Laser Lithography
- Creator: Ghalehbeygi, Omid T. , O'Connor, John , Routley, Ben S. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2018
A nonlinear programming approach to exposure optimization in scanning laser lithography
- Creator: Fleming, Andrew J. , Wills, Adrian , Ghalehbeygi, Omid T. , Routley, Ben , Ninness, Brett
- Resource Type: conference paper
- Date: 2016
Exposure optimization in scanning laser lithography
- Creator: Fleming, Andrew J. , Wills, Adrian G. , Routley, Ben S.
- Resource Type: journal article
- Date: 2016
Optimization and simulation of exposure pattern for scanning laser lithography
- Creator: Ghalehbeygi, Omid T. , Berriman, Garth , Fleming, Andrew J. , Holdsworth, John L.
- Resource Type: conference paper
- Date: 2015
Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling
- Creator: Cotton, Daniel V. , Fell, Christopher J. , Belcher, Warwick J. , Dastoor, Paul C.
- Resource Type: journal article
- Date: 2015
Scanning probe microscopy for silicon device fabrication
- Creator: Simmons, M. Y. , Ruess, F. J. , Reusch, T. C. G. , Goh, K. E. J. , Hallam, T. , Schofield, S. R. , Oberbeck, L. , Curson, N. J. , Hamilton, A. R. , Butcher, M. J. , Clark, R. G.
- Resource Type: journal article
- Date: 2005