List Of Titles

Facets

3laser beams 3resists 2mathematical model 2optical imaging 2optimization 1NSOL 1NSOM 1PPV 1convolution 1cost function 1deconvolution 1electroactive polymer 1integrated optics 1iterative methods 1nanoelectronics 1optical diffraction 1optical fibers 1predictive models 1programming

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Creator

4Fleming, Andrew J. 3Ghalehbeygi, Omid T. 2Routley, Ben S. 1Belcher, Warwick J. 1Berriman, Garth 1Butcher, M. J. 1Clark, R. G. 1Cotton, Daniel V. 1Curson, N. J. 1Dastoor, Paul C. 1Fell, Christopher J. 1Goh, K. E. J. 1Hallam, T. 1Hamilton, A. R. 1Holdsworth, John L. 1Ninness, Brett 1O'Connor, John 1Oberbeck, L. 1Reusch, T. C. G. 1Routley, Ben

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Resource Type

3conference paper 3journal article

Date

22015 22016 12005 12018

Title
Creator
Date

Iterative Deconvolution for Exposure Planning in Scanning Laser Lithography

- Ghalehbeygi, Omid T., O'Connor, John, Routley, Ben S., Fleming, Andrew J.

Creator: Ghalehbeygi, Omid T. , O'Connor, John , Routley, Ben S. , Fleming, Andrew J.
Resource Type: conference paper
Date: 2018

A nonlinear programming approach to exposure optimization in scanning laser lithography

- Fleming, Andrew J., Wills, Adrian, Ghalehbeygi, Omid T., Routley, Ben, Ninness, Brett

Creator: Fleming, Andrew J. , Wills, Adrian , Ghalehbeygi, Omid T. , Routley, Ben , Ninness, Brett
Resource Type: conference paper
Date: 2016

Exposure optimization in scanning laser lithography

- Fleming, Andrew J., Wills, Adrian G., Routley, Ben S.

Creator: Fleming, Andrew J. , Wills, Adrian G. , Routley, Ben S.
Resource Type: journal article
Date: 2016

Optimization and simulation of exposure pattern for scanning laser lithography

- Ghalehbeygi, Omid T., Berriman, Garth, Fleming, Andrew J., Holdsworth, John L.

Creator: Ghalehbeygi, Omid T. , Berriman, Garth , Fleming, Andrew J. , Holdsworth, John L.
Resource Type: conference paper
Date: 2015

Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling

- Cotton, Daniel V., Fell, Christopher J., Belcher, Warwick J., Dastoor, Paul C.

Creator: Cotton, Daniel V. , Fell, Christopher J. , Belcher, Warwick J. , Dastoor, Paul C.
Resource Type: journal article
Date: 2015

Scanning probe microscopy for silicon device fabrication

- Simmons, M. Y., Ruess, F. J., Reusch, T. C. G., Goh, K. E. J., Hallam, T., Schofield, S. R., Oberbeck, L., Curson, N. J., Hamilton, A. R., Butcher, M. J., Clark, R. G.

Creator: Simmons, M. Y. , Ruess, F. J. , Reusch, T. C. G. , Goh, K. E. J. , Hallam, T. , Schofield, S. R. , Oberbeck, L. , Curson, N. J. , Hamilton, A. R. , Butcher, M. J. , Clark, R. G.
Resource Type: journal article
Date: 2005

English (Australia)
English (Australia)
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