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flexure-based nanopositioner

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1No 1Yes

1differential sensor 1displacement sensor 1piezoelectric transducer 1piezoresistive silicon strain gauge

1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian

1journal article 1thesis

Date

12021 12022

1Adobe Acrobat PDF

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Full Text

1No 1Yes

1differential sensor 1displacement sensor 1piezoelectric transducer 1piezoresistive silicon strain gauge

1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian

1journal article 1thesis

Date

12021 12022

1Adobe Acrobat PDF

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Displacement amplification and piezo-sensing in differentially piezo-driven nanopositioners

Creator: Bazaei, Ali
Resource Type: thesis
Date: 2022

Displacement amplification and piezo-sensing in differentially piezo-driven nanopositioners

Creator: Bazaei, Ali
Resource Type: thesis
Date: 2022

Displacement amplification and differential actuation in piezo driven nanopositioners

- Bazaei, Ali, Ettefagh, Massoud Hemmasian, Chen, Zhiyong

Creator: Bazaei, Ali , Ettefagh, Massoud Hemmasian , Chen, Zhiyong
Resource Type: journal article
Date: 2021

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