Your selections:
A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control
- Maroufi, Mohammad, Bazaei, Ali, Moheimani, S. O. Reza
Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza
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