Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters
- Creator: Bazaei, Ali , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2012
A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications
- Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: conference paper
- Date: 2009