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electrostatic devices

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1No 1Yes

1energy harvesting 1frequency response 1heating 1microsensors 1position measurement 1prosthetics 1silicon-on-insulator 1ultrasonic transducers

1Bazaei, Ali 1Fowler, Anthony G. 1Moheimani, S. O. R. 1Moheimani, S. O. Reza 1Yuce, M. R. 1Zhu, Y.

Date

12009 12012

1Adobe Acrobat PDF

Facets

Full Text

1No 1Yes

1energy harvesting 1frequency response 1heating 1microsensors 1position measurement 1prosthetics 1silicon-on-insulator 1ultrasonic transducers

1Bazaei, Ali 1Fowler, Anthony G. 1Moheimani, S. O. R. 1Moheimani, S. O. Reza 1Yuce, M. R. 1Zhu, Y.

Date

12009 12012

1Adobe Acrobat PDF

Title
Creator
Date

Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters

- Bazaei, Ali, Fowler, Anthony G., Moheimani, S. O. Reza

Creator: Bazaei, Ali , Fowler, Anthony G. , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2012

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A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications

- Zhu, Y., Moheimani, S. O. R., Yuce, M. R.

Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
Resource Type: conference paper
Date: 2009

A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications

Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
Resource Type: conference paper
Date: 2009

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