Generalized predictive control of temperature on an atomic layer deposition reactor
- Creator: He, Wen-Jie , Zhang, Hai-Tao , Chen, Zhiyong , Chu, Bo , Cao, Kun , Shan, Bin , Chen, Rong
- Resource Type: journal article
- Date: 2015
Temperature control for nano-scale films by spatially-separated atomic layer deposition based on generalized predictive control
- Creator: He, Wen-Jie , Zhang, Hai-Tao , Chen, Zhiyong , Lin, Ji-Long , Tian, Kan , Shan, Bin , Chen, Rong
- Resource Type: journal article
- Date: 2015