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MEMS nanopositioners

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1No 1Yes

1cross coupling 1force measurement 1kinematics 1microelectromechanical systems 1microelectromechanical systems (MEMS) 1nanopositioning

1Maroufi, Mohammad 1Moheimani, S. O. Reza 1Moore, Steven

1conference paper 1thesis

1Adobe Acrobat PDF

Facets

Full Text

1No 1Yes

1cross coupling 1force measurement 1kinematics 1microelectromechanical systems 1microelectromechanical systems (MEMS) 1nanopositioning

1Maroufi, Mohammad 1Moheimani, S. O. Reza 1Moore, Steven

1conference paper 1thesis

1Adobe Acrobat PDF

Title
Creator
Date

Cross coupling in parallel kinematic MEMS nanopositioners

- Maroufi, Mohammad, Moheimani, S. O. Reza

Creator: Maroufi, Mohammad , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2016

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Instrumentation techniques for the control of MEMS nanopositioners

- Moore, Steven

Creator: Moore, Steven
Resource Type: thesis
Date: 2016

Instrumentation techniques for the control of MEMS nanopositioners

Creator: Moore, Steven
Resource Type: thesis
Date: 2016

1

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