Model-based Q factor control for photothermally excited microcantilevers
- Creator: Ruppert, Michael G. , Routley, Ben S. , Fleming, Andrew J. , Yong, Yuen K. , Fantner, Georg E.
- Resource Type: conference paper
- Date: 2019
Multivariable model-less feedforward control of a monolithic nanopositioning stage with FIR Filter inversion
- Creator: Omidbeike, Meysam , Eielsen, Arnfinn A. , Yong, Yuen K. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2019