A MEMS nanopositioner with thermal actuator and on-chip thermal sensor
- Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010
A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
- Creator: Ji, Lujun , Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010