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ISBN:9781424481705

1MEMS 1capacitive sensors 1elemental semiconductors 1frequency measurement 1microactuators 1microelectromechanical systems 1micromachining 1microsensors 1nanopositioners 1nanosensors 1silicon

1Ji, Lujun

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1MEMS 1capacitive sensors 1elemental semiconductors 1frequency measurement 1microactuators 1microelectromechanical systems 1micromachining 1microsensors 1nanopositioners 1nanosensors 1silicon

1Ji, Lujun

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A MEMS nanopositioner with thermal actuator and on-chip thermal sensor

- Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
Resource Type: conference paper
Date: 2010

A MEMS nanopositioner with thermal actuator and on-chip thermal sensor

Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
Resource Type: conference paper
Date: 2010

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A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor

- Ji, Lujun, Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

Creator: Ji, Lujun , Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
Resource Type: conference paper
Date: 2010

A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor

Creator: Ji, Lujun , Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
Resource Type: conference paper
Date: 2010

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