A self servo writing scheme for a MEMS storage device with sub-nanometer precision
- Creator: Sebastian, Abu , Pantazi, Angeliki , Moheimani, S. O. Reza , Pozidis, Haris , Eleftheriou, Evangelos
- Resource Type: conference paper
- Date: 2008
Achieving subnanometer precision in a MEMS-based storage device during self-servo write process
- Creator: Sebastian, Abu , Pantazi, Angeliki , Moheimani, S. O. Reza , Pozidis, Haris , Eleftheriou, Evangelos
- Resource Type: journal article
- Date: 2008