MEMS nanopositioner for Lissajous-scan atomic force microscopy

- Fowler, Anthony G., Maroufi, Mohammad, Bazaei, Ali, Moheimani, S. O. Reza

MEMS rotary microgripper with integrated electrothermal force sensor

- Piriyanont, Busara, Moheimani, S. O. Reza

Novel reciprocal self-sensing techniques for tapping-mode atomic force microscopy

- Ruppert, Michael G., Moheimani, S. O. Reza

Self-sensing electrostatic drive in a MEMS nanopositioner for the application of vibration control

- Moore, Steven I., Moheimani, S. O. Reza

Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes

- Bazaei, Ali, Mohammadi, Ali, Moheimani, S. O. Reza

Sensorless damping control of a high speed flexure guided nanopositioner

- Fairbairn, Matthew W., Wadikhaye, Sachin P., Moheimani, S. O. Reza

Sensorless implementation of a PPF controller for active Q control of an AFM microcantilever

- Fairbairn, Matthew W., Müller, Philipp, Moheimani, S. O. Reza

Simultaneous actuation and sensing for electrostatic drives in MEMS using frequency modulated capacitive sensing

- Moore, Steven I., Moheimani, S. O. Reza

Synthesis of modulated-demodulated control systems

- Bazaei, Ali, Moheimani, S. O. Reza

Video-rate lissajous-scan atomic force microscopy

- Yong, Yuen Kuan, Bazaei, Ali, Moheimani, S. O. Reza

Zero displacement microelectromechanical force sensor using feedback control

- Coskun, M. Bulut, Moore, Steven, Moheimani, S. O. Reza, Neild, Adrian, Alan, Tuncay

A MEMS electromagnetic energy harvester using ultrasonic excitation

- Fowler, Anthony G., Moheimani, S. O. Reza, Behrens, Sam

A new approach to active Q control of an atomic force microscope micro-cantilever operating in tapping mode

- Fairbairn, Matthew W., Moheimani, S. O. Reza

A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner

- Yong, Yuen Kuan, Fleming, Andrew J., Moheimani, S. O. Reza

A novel self-sensing technique for tapping-mode atomic force microscopy

- Ruppert, Michael G., Moheimani, S. O. Reza

A robust loop-shaping approach to fast and accurate nanopositioning

- Aphale, Sumeet S., Ferreira, Antoine, Moheimani, S. O. Reza

Active piezoelectric shunt control of an atomic force microscope micro-cantilever

- Fairbairn, Matthew W., Mueller, Philipp, Moheimani, S. O. Reza

Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation

- Fowler, Anthony G., Rakotondrabe, Micky, Moheimani, S. O. Reza

Control of a high-speed nanopositioner for lissajous-scan video-rate AFM

- Yong, Yuen Kuan, Bazaei, Ali, Moheimani, S. O. Reza

Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing

- Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. Reza