A switched actuation and sensing method for a MEMS electrostatic drive
- Creator: Moore, Steven Ian , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2016
Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues
- Creator: Yong, Y. K. , Moheimani, S. O. R. , Kenton, B. J. , Leang, K. K.
- Resource Type: journal article
- Date: 2012
Note: A method for estimating the resolution of nanopositioning systems
- Creator: Fleming, Andrew J.
- Resource Type: journal article
- Date: 2012
High speed nanopositioning with force feedback
- Creator: Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2010