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Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors
- Leiro, Freddy Romero, Bazaei, Ali, Regnier, Stephane, Boudaoud, Mokrane
A survey of control issues in nanopositioning
- Devasia, Santosh, Eleftheriou, Evangelos, Moheimani, S. O. Reza
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