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An experimental comparison of PI, inversion, and damping control for high performance nanopositioning
- Fleming, Andrew J., Leang, Kam K.
Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed
- Kenton, Brian J., Fleming, Andrew J., Leang, Kam K.
Design, modeling and control of nanopositioning systems
Evaluation of charge drives for scanning probe microscope positioning stages
High performance nanopositioning with integrated strain and force feedback
High-speed serial-kinematic AFM scanner: design and drive considerations
- Leang, Kam K., Fleming, Andrew J.
High-speed serial-kinematic SPM scanner: design and drive considerations
Integrated strain and force feedback for high-performance control of piezoelectric actuators
Ultra-fast dual-stage vertical positioning for high performance SPMs
- Fleming, Andrew J., Kenton, Brian J., Leang, Kam K.
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