Design and control of a single-chip SOI-MEMS atomic force microscope
High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy
Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach
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