Displacement sensing by piezoelectric transducers in high-speed lateral nanopositioning
Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane
Hysteresis in nanopositioning systems driven by dual-stack differential driving piezoelectric actuators
Ettefagh, Massoud Hemmasian, Bazaei, Ali, Wang, Zhiyue, Chen, Zhiyong, Zhang, Hai-Tao, Regnier, Stephane, Boudaoud, Mokrane
In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
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