Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation
- Creator: Fowler, Anthony G. , Rakotondrabe, Micky , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2013
Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
- Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2012