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13-DOF 1differential actuation 1differential sensing 1internal model control 1linear systems 1nano-positioning 1parallel robots 1piezo stacks 1scanning probe microscopy 1shape 1vibrations

1Regnier, Stephane 1Régnier, Stéphane

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13-DOF 1differential actuation 1differential sensing 1internal model control 1linear systems 1nano-positioning 1parallel robots 1piezo stacks 1scanning probe microscopy 1shape 1vibrations

1Regnier, Stephane 1Régnier, Stéphane

Title
Creator
Date

A Micro-Robotic Approach for The Correction of Angular Deviations in AFM Samples From Generic Topographic Data

- Leiro, Freddy Romero, Bazaei, Ali, Régnier, Stéphane, Boudaoud, Mokrane

Creator: Leiro, Freddy Romero , Bazaei, Ali , Régnier, Stéphane , Boudaoud, Mokrane
Resource Type: conference paper
Date: 2022

Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors

- Leiro, Freddy Romero, Bazaei, Ali, Regnier, Stephane, Boudaoud, Mokrane

Creator: Leiro, Freddy Romero , Bazaei, Ali , Regnier, Stephane , Boudaoud, Mokrane
Resource Type: conference paper
Date: 2022

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