The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages

Title: The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages
Creator: Yong, Yuen Kuan; Lu, Tien-Fu
Relation: Mechanism and Machine Theory Vol. 43, Issue 3, p. 347-363
Publisher Link: http://dx.doi.org/10.1016/j.mechmachtheory.2007.03.007
Publisher: Elsevier
Resource Type: journal article
Date: 2008
Description: This paper presents the effect of the accuracies of flexure hinge compliance equations (the accuracies vary with a geometrical ratio, t/R of a hinge) on the output compliances of RRR and 3-RRR micro-motion stages. Closed-form output compliance models of the stages are derived (with flexure hinge compliances as one of the variables) to investigate the aforementioned effect. The output compliances, calculated using various flexure hinge equations, are compared to that of the finite element analysis (FEA) and the results are discussed.
Subject: micro-motion stage; output compliance; flexure hinge equation
Identifier: uon:5090
Identifier: http://hdl.handle.net/1959.13/42956
Identifier: ISSN:0094-114X
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