- Title
- Standardizing resolution definition in scanning helium microscopy
- Creator
- Bergin, M.; Roland-Batty, W.; Hatchwell, C. J.; Myles, T. A.; Martens, J.; Fahy, A.; Barr, M.; Belcher, W. J.; Dastoor, P. C.
- Relation
- Ultramicroscopy Vol. 233
- Publisher Link
- http://dx.doi.org/10.1016/j.ultramic.2021.113453
- Publisher
- Elsevier
- Resource Type
- journal article
- Date
- 2022
- Description
- Resolution is a key parameter for microscopy, but methods for standardizing its definition are often poorly defined. For a developing technique such as scanning helium microscopy, it is critical that a consensus-based protocol for determining instrument resolution is prepared as a written standard to allow both comparable quantitative measurements of surface topography and direct comparisons between different instruments. In this paper we assess a range of quantitative methods for determining instrument resolution and determine their relative merits when applied to the specific case of the scanning helium microscope (SHeM). Consequently, we present a preliminary protocol for measuring the resolution in scanning helium microscopy based upon utilizing appropriate test samples with sets of slits of well-defined dimensions to establish the quantitative resolution of any similar instrument.
- Subject
- scanning helium microscopy; atom scattering; resolution
- Identifier
- http://hdl.handle.net/1959.13/1465731
- Identifier
- uon:47356
- Identifier
- ISSN:0304-3991
- Language
- eng
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