In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners

Title: In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners
Creator: Bazaei, Ali; Boudaoud, Mokrane; Ettefagh, Massoud Hemmasian; Chen, Zhiyong; Regnier, Stephane
Relation: 2019 IEEE Sensors. Proceedings of 2019 IEEE Sensors (Montreal, Canada 27-30 October, 2019)
Publisher Link: http://dx.doi.org/10.1109/SENSORS43011.2019.8956836
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2019
Description: We address design, implementation, and characterization of semiconductor strain gauges as stage displacement sensors with small footprint for piezo-driven nanopositioners in differential actuation mode. The results indicate that in this actuation mode, a differential sensing strategy provides much better accuracy than the conventional non-differential schemes. The proposed differential sensor has a large sensitivity of kHz.4.4V/μm, 3σ-resolution of 2.4 nm, and bandwidth of 4 nm, and bandwidth of 4 kHz.
Subject: nanopositioning; sensors; semiconductor devices; piezo-driven nanopositioners
Identifier: http://hdl.handle.net/1959.13/1460323
Identifier: uon:45934
Identifier: ISBN:9781728116341
Language: eng
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