- Title
- A five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet
- Creator
- Omidbeike, Meysam; Yong, Yuen K.; Moore, Steven I.; Fleming, Andrew J.
- Relation
- 2019 International Conference on Manipulation, Automation and Robotics at Small Scales. Proceedings of MARSS 2019: 4th International Conference on Manipulation, Automation, and Robotics at Small Scales (Helsinki, Finland 01-05 July, 2019)
- Publisher Link
- http://dx.doi.org/10.1109/MARSS.2019.8860940
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2019
- Description
- The paper describes design, modeling and control of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. In this design, actuators are created by removing parts of the sheet using ultrasonic machining. The constructed nanopositioner is ultra-compact with a thickness of 1 mm. It has a X and Y travel range of 15.5 um and 13.2 um respectively; a Z travel range of 26 um; and a rotational motion about the X- and Y-axis of 600 urad and 884 urad respectively. The first resonance frequency occurs at 883 Hz in the Z-axis, and the second and third resonance frequency appears at 1850 Hz, rotating about the X- and Y axis. A decentralized control strategy is implemented to track Z, x and y motions. The controller provides good tracking and significantly reduces cross-coupling motions among the three degrees-of-freedom.
- Subject
- nanopositioning; actuators; effective mass; resonant frequency; force; electrodes; SDG 9; Sustainable Development Goals
- Identifier
- http://hdl.handle.net/1959.13/1454253
- Identifier
- uon:44878
- Identifier
- ISBN:9781728109497
- Language
- eng
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