- Title
- Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element analysis
- Creator
- Maess, Johannes; Fleming, Andrew J.; Allgoewer, Frank
- Relation
- Review of Scientific Instruments Vol. 79, Issue 1
- Relation
- http://scitation.aip.org/rsio
- Publisher
- American Institute of Physics
- Resource Type
- journal article
- Date
- 2008
- Description
- Piezoelectric tube scanners are widely used in scanning probe microscopes to position the sample or the probe. Fast and accurate scanning requires the suppression of dominant low-frequency resonances as well as the compensation of dynamics-coupling effects. The present article gives a detailed description of the fully coupled tube scanner dynamics over a wide frequency range modeled by finite element (FE) analysis using the commercially available software package ANSYS. The effect of a sample mass attached to the top of the tube is investigated by considering its added mass and local stiffening. A model order reduction scheme is applied to obtain a low order model that describes the lateral and vertical deflections as well as the voltage induced on quadrant electrodes. Comparison to experimental data demonstrates a good agreement for both the full FE model and reduced order model.
- Subject
- tracking control; compensation; hysteresis; microscopy; model; actuation
- Identifier
- http://hdl.handle.net/1959.13/38717
- Identifier
- uon:4350
- Identifier
- ISSN:0034-6748
- Language
- eng
- Full Text
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| Thumbnail | File | Description | Size | Format | |||
|---|---|---|---|---|---|---|---|
| View Details Download | ATTACHMENT01 | Publisher version (open access) | 335 KB | Adobe Acrobat PDF | View Details Download |