- Title
- A monolithic serial-kinematic nanopositioner with integrated sensors and actuators
- Creator
- Moore, Steven Ian; Omidbeike, Meysam; Fleming, Andrew; Yong, Yuen Kuan
- Relation
- 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM). AIM 2018: IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Auckland, New Zealand 9-12 July, 2018) p. 150-155
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2018.8452225
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2018
- Description
- This article describes the design, modeling and simulation of a serial-kinematic nanopositioner machined from a single sheet of piezoelectric material. In this class of nanopo-sitioners, the flexures, sensors and actuators are completely integrated into a single monolithic structure. A non-trivial electrode topology is etched into the sheet to achieve in-plane bending and displacement of the moving platform. Finite element analysis predicts a sensitivity of 18.6 nmN in the x-axis and 18.1 nm/V in the y-axis with a voltage limit of -250 V to 1000 V. The first resonance frequency is 250 Hz in the Z axis. This design enables high-speed, long-range, lateral positioning in space-limited applications.
- Subject
- nanopositioning; mathematical model; electrodes; actuators
- Identifier
- http://hdl.handle.net/1959.13/1446388
- Identifier
- uon:42853
- Identifier
- ISBN:9781538618547
- Identifier
- ISSN:2159-6255
- Language
- eng
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