- Title
- Integrated force and displacement sensing in active microcantilevers for off-resonance tapping mode atomic force microscopy
- Creator
- de Bem, Natã F. S.; Ruppert, Michael G.; Yong, Yuen K.; Fleming, Andrew J.
- Relation
- 2020 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS). Proceedings of MARSS 2020 International Conference on Manipulation, Automation, and Robotics at Small Scales (Toronto, Canada 13-17 July, 2020) p. 24-29
- Publisher Link
- http://dx.doi.org/10.1109/MARSS49294.2020.9307881
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2020
- Description
- Integrated on-chip actuation and sensing in micro-cantilevers for atomic force microscopy (AFM) allows faster scanning speeds, cleaner frequency responses and smaller cantilevers. However, a single integrated sensor suffers from cross-coupling between displacements originating from tip-sample forces and direct actuation. This paper addresses this issue by presenting a novel micro-cantilever with on-chip actuation and integrated dual sensing for AFM with application to off resonance tapping modes in AFM. The proposed system is able to measure tip force and deflection simultaneously. A mathematical model is developed for a rectangular cantilever to describe the system and is validated with finite element analysis.
- Subject
- force; strain; sensors; resonant frequency; bending; system-on-chip
- Identifier
- http://hdl.handle.net/1959.13/1438670
- Identifier
- uon:40682
- Identifier
- ISBN:9781728193496
- Language
- eng
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