Serial-kinematic monolithic nanopositioner with in-plane bender actuators

Title: Serial-kinematic monolithic nanopositioner with in-plane bender actuators
Creator: Moore, Steven I.; Yong, Yuen K.; Omidbeike, Meysam; Fleming, Andrew J.
Relation: Mechatronics Vol. 75, Issue May 2021, no. 102541
Publisher Link: http://dx.doi.org/10.1016/j.mechatronics.2021.102541
Publisher: Elsevier
Resource Type: journal article
Date: 2021
Description: This article describes a monolithic nanopositioner constructed from in-plane bending actuators which provide greater deflection than previously reported extension actuators, at the expense of stiffness and resonance frequency. The proposed actuators are demonstrated by constructing an XY nanopositioning stage with a serial kinematic design. Analytical modeling and finite-element-analysis accurately predicts the experimental performance of the nanopositioner. A 10 µm range is achieved in the X and Y axes with an applied voltage of +/-200 V. The first resonance mode occurs at 250 Hz in the Z axis. The stage is demonstrated for atomic force microscopy imaging.
Subject: nanopositioning; atomic force microscopy; piezoelectric actuators; kinematics
Identifier: http://hdl.handle.net/1959.13/1435278
Identifier: uon:39666
Identifier: ISSN:0957-4158
Language: eng
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