- Title
- Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing
- Creator
- Ruppert, Michael G.; Moore, Steven I.; Zawierta, Michal; Fleming, Andrew J.; Putrino, Gino; Yong, Yuen K.
- Relation
- Nanotechnology Vol. 30, Issue 8, no. 0855503
- Publisher Link
- http://dx.doi.org/10.1088/1361-6528/aae40b
- Publisher
- Institute of Physics Publishing (IOP)
- Resource Type
- journal article
- Date
- 2019
- Description
- Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged; a passive rectangular shaped cantilever design has been adopted as the industry wide standard. In this article, we demonstrate multimode AFM imaging on higher eigenmodes as well as bimodal AFM imaging with cantilevers using fully integrated piezoelectric actuation and sensing. The cantilever design maximizes the higher eigenmode deflection sensitivity by optimizing the transducer layout according to the strain mode shape. Without the need for feedthrough cancellation, the read-out method achieves close to zero actuator/sensor feedthrough and the sensitivity is sufficient to resolve the cantilever Brownian motion.
- Subject
- atomic force microscopy; piezoelectric actuation and sensing; microelectromechanical systems (MEMS); multifrequency AFM; feedthrough; noise analysis
- Identifier
- http://hdl.handle.net/1959.13/1398938
- Identifier
- uon:34500
- Identifier
- ISSN:0957-4484
- Rights
- This is an author-created, un-copyedited version of an article accepted for publication/published in Nanotechnologies. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://dx.doi.org/10.1088/1361-6528/aae40b.
- Language
- eng
- Full Text
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