An ultrathin monolithic XY nanopositioning stage constructed from a single sheet of piezoelectric material

Title: An ultrathin monolithic XY nanopositioning stage constructed from a single sheet of piezoelectric material
Creator: Fleming, Andrew J.; Yong, Yuen Kuan
Relation: IEEE-ASME Transactions on Mechatronics Vol. 22, Issue 6, p. 2611-2618
Publisher Link: http://dx.doi.org/10.1109/TMECH.2017.2755659
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2017
Description: The paper describes an XY nanopositioning stage constructed from flexures and actuators machined into a single sheet of piezoelectric material. Ultrasonic machining is used to remove piezoelectric material and create electrode features. The constructed device is 0.508 mm thick, and has a travel range of 8.6 μm in the X and Y axes. The first resonance mode occurs at 597 Hz, which makes the device suitable for a wide range of standard nanopositioning applications where cost and size are considerations. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.
Subject: nanopositioning; electrodes; force; resonant frequency; machining; microscopy; finite element analysis
Identifier: http://hdl.handle.net/1959.13/1395717
Identifier: uon:33923
Identifier: ISSN:1083-4435
Language: eng
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