Piezoelectric bimorph actuator with integrated strain sensing electrodes

Title: Piezoelectric bimorph actuator with integrated strain sensing electrodes
Creator: Mansour, Sepehr Zarif; Seethaler, Rudolf J.; Teo, Yik R.; Yong, Yuen K.; Fleming, Andrew J.
Relation: 16th IEEE Conference on SENSORS (SENSORS 2017). Proceedings of the IEEE SENSORS 2017 Conference (Glasgow, Scotland 29 October - 1 November, 2017) p. 253-255
Publisher Link: http://dx.doi.org/10.1109/ICSENS.2017.8233951
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2017
Description: This article describes a new method for estimating the tip displacement of piezoelectric benders. Two resistive strain gauges are fabricated within the top and bottom electrodes using an acid etching process. These strain gauges are employed in a half bridge electrical configuration to measure the surface resistance change, and estimate the tip displacement. Experimental validation shows a 1.1 % maximum difference between the strain sensor and a laser triangulation sensor.
Subject: displacement; electrodes; strain measurement; surface resistance
Identifier: http://hdl.handle.net/1959.13/1384599
Identifier: uon:32109
Identifier: ISBN:9781509010127
Language: eng
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