Switched self-sensing actuator for a MEMS nanopositioner

Title: Switched self-sensing actuator for a MEMS nanopositioner
Creator: Moore, Steven Ian; Yong, Yuen Kuan; Moheimani, S. O. Reza
Relation: IEEE International Conference on Mechatronics (ICM). Proceedings of the IEEE International Conference on Mechatronics (ICM) (Churchill, VIC 13-15 February, 2017) p. 372-377
Publisher Link: http://dx.doi.org/10.1109/ICMECH.2017.7921134
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2017
Description: This work outlines the instrumentation and actuation of a MEMS nanopositioner, implementing a switching electronics based self-sensing actuation technique. Self-sensing actuation allows for optimal use of transducer die space in MEMS designs. The switching design accommodates actuation voltages of 50 V and is compatible with the silicon-on-insulator microfabrication process. The switching electronics are designed to be directly interfaced to a digital control platform. The actuator is based on the class D amplifier and the sensor is implemented using a ΣΔ modulator to create a displacement-to-digital type sensor that is operated at 1 MHz.
Subject: sensors; nanopositioning; actuators; micromechanical devices; capacitance; electrostatics
Identifier: http://hdl.handle.net/1959.13/1350845
Identifier: uon:30616
Identifier: ISBN:9781509045396
Rights: .
Language: eng
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