- Title
- Switched self-sensing actuator for a MEMS nanopositioner
- Creator
- Moore, Steven Ian; Yong, Yuen Kuan; Moheimani, S. O. Reza
- Relation
- IEEE International Conference on Mechatronics (ICM). Proceedings of the IEEE International Conference on Mechatronics (ICM) (Churchill, VIC 13-15 February, 2017) p. 372-377
- Publisher Link
- http://dx.doi.org/10.1109/ICMECH.2017.7921134
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2017
- Description
- This work outlines the instrumentation and actuation of a MEMS nanopositioner, implementing a switching electronics based self-sensing actuation technique. Self-sensing actuation allows for optimal use of transducer die space in MEMS designs. The switching design accommodates actuation voltages of 50 V and is compatible with the silicon-on-insulator microfabrication process. The switching electronics are designed to be directly interfaced to a digital control platform. The actuator is based on the class D amplifier and the sensor is implemented using a ΣΔ modulator to create a displacement-to-digital type sensor that is operated at 1 MHz.
- Subject
- sensors; nanopositioning; actuators; micromechanical devices; capacitance; electrostatics
- Identifier
- http://hdl.handle.net/1959.13/1350845
- Identifier
- uon:30616
- Identifier
- ISBN:9781509045396
- Rights
- .
- Language
- eng
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